Sts multiplex ase-hrm icp etcher
http://www.semistarcorp.com/product/spts-mpx-ase-hrm-icp-pro-etcher-system/ WebSTS ASE Multiplex ICP System (Bosch Process) OEM = Surface Technology Systems Limited (AKA: STS) Model = MESC Multiplex ICP ASE Type = ICP RIE (Inductively Coupled …
Sts multiplex ase-hrm icp etcher
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WebSPTS MPX ASE-HRM ICP PRO Etcher 200mm, Deep Silicon Etch (Bosch Process), High Rate Magnetic Chamber200mm SPTS MPX ICP SR Etcher Single Chamber, Load-Locked, 2007 Vintage200mm SPTS Primaxx Monarch 3 HF Etcher HF Vapor Etcher, currently 6″/150mm, capable of 200mm, Semi-Automatic 3-wafer loader with Load Lock.200mm WebSTS Multiplex ICP offers large range materials etching possibility: insulators (SiO 2, Si 3 N 4 and SiC), silicon, metals (Al Alloys, Pt, Ti) and some polymers…. At CMI, this etcher is … Applications and deadlines. Before applying for admission, candidates should consult …
WebSurface Tech Sys (STS) STS MESC Mutiplex ICP Etcher Description: STS MESC Multiplex ICP Plasma etcher, 6″ Load lock system; Al chamber; Dual chlorine gas and BCL3; … http://pta-grenoble.com/facilities/sts-multiplex-spts
WebLam AutoEtch 490 Plasma Etcher Equipment for 4 to 6 inch wafer Manufacturer :Lam Research Condition :Used (Refurbished and warranty is available). Contact Us for more information. Wafer Size... http://www.semistarcorp.com/product/multiplex-icp-macs-bosch-process/
WebAnisotropic, high aspect ratio etching of silicon Includes: Process chamber module Single wafer load-lock Control rack and associated pumps / chillers Hardware Specs: Chamber: Temperature controlled Base pressure: <1.1E-6 Torr (cold) Leak-up rate: <0.2E-3 Torr/min (cold) Temperature control: +20°C to +80°C Source: Inductively coupled, high density
WebDescription Description Model: Multiplex ICP MACS Bosch Process / 6 inch Photos: Download here Category: Etch RIE ICP Original Equipment Manufacturer: Surface Tech Sys ( STS , SPTS ) Condition: Used, Complete, working condition. We sell it at AS IS,Where IS condition. Refurbished and fully tested is optional at extra charge. Wafer Size: 6 inch now order history linkWebSilicon Etcher - Year 2003 In addition to this Surface Technology Systems MXP Multiplex ICP ASE HR, Capovani Brothers Inc stocks a wide range of used and refurbished plasma etching equipment including RIE, ICP and DRIE plasma etch tools. iredell county real estate for saleWebThis is a ICP (Inductive Charged Plasma) Deep Reactive Ion etcher from Surface Technology Systems. The platform is single-chamber, manual loadlock system. The etch process is based on the patented Laermer and … order history in microsoftiredell county real estate taxesWebThe STS inductively coupled plasma (ICP) etcher (Figure 1) is capable of etching Al, Cr, Ti, W, and Nb with a photoresist mask. The tool is plumbed with SF6, CHF3, Ar, O2, Cl2 and BCl3 gases. It possesses a 1000W ICP generator, and a 500W bias generator. It possesses a He backside cooling system, and uses a mechanical clamp with 8 ceramic ... iredell county real estateWebThis Multiplex ASE HRM Etcher / Asher was manufactured in by Sts Related Products Multiplex ICP Etcher 6 Etcher / Asher. Make: Sts: Model: Multiplex ICP Etcher 6: Tool: … order history instacartWebSep 1, 2024 · Microscale square pillar arrays with various dimen- sions on Si wafer were etched in an STS ASE ICP system (ICP, STS Multiplex ASE-HRM ICP Etcher, STS Ltd., England) us- ing C 4F 8/SF 6gases. The textured samples were cleaned and hydroxylated by immersing them into a piranha solution (mix- ture of sulfuric acid and hydrogen peroxide, … order high quality poster